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Proceedings Paper

Monitoring printing fidelity with image correlation measurements on the CD SEM
Author(s): Charles N. Archie; Eric P. Solecky; Timothy S. Hayes; G. William Banke
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Paper Details

Date Published: 22 August 2001
PDF: 10 pages
Proc. SPIE 4344, Metrology, Inspection, and Process Control for Microlithography XV, (22 August 2001); doi: 10.1117/12.436764
Show Author Affiliations
Charles N. Archie, IBM Advanced Semiconductor Technology Ctr. (United States)
Eric P. Solecky, IBM Advanced Semiconductor Technology Ctr. (United States)
Timothy S. Hayes, IBM Microelectronics Div. (United States)
G. William Banke, IBM Microelectronics Div. (United States)


Published in SPIE Proceedings Vol. 4344:
Metrology, Inspection, and Process Control for Microlithography XV
Neal T. Sullivan, Editor(s)

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