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Proceedings Paper

Electric force microscopy with a single carbon nanotube tip
Author(s): John A. Dagata; F. S. S. Chien; S. Gwo; K. Morimoto; Takahito Inoue; J. Itoh; Hiroshi Yokoyama
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Paper Abstract

Carbon nanotube tips offer a significant improvement over standard scanned probe microscope (SPM) tips for electrical characterization of nanodevice structures. Carbon nanotube tips are compatible with requirements for integrated SPM_probe station instruments in which SPM-based lithography, topography, electric force microscopy, and traditional current-voltage measurements are performed simultaneously or sequentially. As device dimensions shrink, traditional diagnostics will be unable to probe nanometer-scale phenomena that affect device performance and reliability. At the same time, the introduction of novel materials such as silicon-on-insulator into standard processing will require methods that can rapidly identify defects and their local behavior. Electric force microscopy with carbon nanotube tips offers unique capabilities for satisfying these needs.

Paper Details

Date Published: 22 August 2001
PDF: 14 pages
Proc. SPIE 4344, Metrology, Inspection, and Process Control for Microlithography XV, (22 August 2001); doi: 10.1117/12.436728
Show Author Affiliations
John A. Dagata, National Institute of Standards and Technology (United States)
F. S. S. Chien, National Tsing Hua Univ. (Taiwan)
S. Gwo, National Tsing Hua Univ. (Taiwan)
K. Morimoto, Matsushita Electrical Industrial Co. Ltd. (Japan)
Takahito Inoue, Electrotechnical Lab. (Japan)
J. Itoh, Electrotechnical Lab. (Japan)
Hiroshi Yokoyama, Electrotechnical Lab. (Japan)

Published in SPIE Proceedings Vol. 4344:
Metrology, Inspection, and Process Control for Microlithography XV
Neal T. Sullivan, Editor(s)

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