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Proceedings Paper

Vibrational analysis of 200-mm EPL masks
Author(s): Andrew R. Mikkelson; Cheng-Fu Chen; Roxann L. Engelstad; Edward G. Lovell
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Paper Abstract

The vibratory response of Electron-beam Projection Lithography (EPL) masks has been characterized for two applications: to support the processes for mask cleaning (e.g., PLASMAX) and to preclude resonance conditions during metrology and inspection. The analysis of a 200-mm SCALPEL mask has been completed using experimental and numerical procedures to determine the dynamic response; the procedures characterized transverse vibrations by identifying the natural frequencies with their respective mode shapes. For mask cleaning applications, dominant modes were superimposed to form a more uniform acceleration field within the grillage area for effective removal of contaminants. In order to assess potential resonance issues, a finite element model was used to simulate the four-pad support, which is currently proposed for the EPL mask standard chuck. The fundamental frequency of the mask in the four-pad support was over 300Hz.

Paper Details

Date Published: 20 August 2001
PDF: 9 pages
Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); doi: 10.1117/12.436698
Show Author Affiliations
Andrew R. Mikkelson, Univ. of Wisconsin/Madison (United States)
Cheng-Fu Chen, Univ. of Wisconsin/Madison (United States)
Roxann L. Engelstad, Univ. of Wisconsin/Madison (United States)
Edward G. Lovell, Univ. of Wisconsin/Madison (United States)


Published in SPIE Proceedings Vol. 4343:
Emerging Lithographic Technologies V
Elizabeth A. Dobisz, Editor(s)

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