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Proceedings Paper

MEMS/MEOMS: cognitive machine vision in a MOEMS world
Author(s): Rick Conner
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Paper Abstract

MEMS/MEOMS devices are ubiquitous and span a diverse set of markets and technology circles Typically these devices are inserted into the final product with only a minimal amount of precision inspection. It is imperative that micro inspection and other micro packaging technique ware implemented at the front end of the manufacturing process to avoid costly yield problems. Metrology and Machine Vision can increase yields throughputs, and reduce downtime by minimizing reliance on human vision and manual dexterity. In this work we begin to define a systems view of the different types of MEMS/MEOMS devices and associated micro packaging and inspection techniques and issues. We then conclude with cognitive machine vision and experiment.

Paper Details

Date Published: 30 July 2001
PDF: 12 pages
Proc. SPIE 4532, Active and Passive Optical Components for WDM Communication, (30 July 2001); doi: 10.1117/12.436046
Show Author Affiliations
Rick Conner, Newport Corp. (United States)

Published in SPIE Proceedings Vol. 4532:
Active and Passive Optical Components for WDM Communication
Achyut Kumar Dutta; Abdul Ahad Sami Awwal; Niloy K. Dutta; Katsunari Okamoto, Editor(s)

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