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Proceedings Paper

Microscopic study of the structure of the SnO2 thin films obtained by the RGTO technique
Author(s): Jerzy Uljanow; Krzysztof Waczynski; Adam Broja; Teresa Karczewska-Buczek
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Paper Abstract

The results on the use of technology of rheotaxial growth and thermal oxidation to p0repare sensory layer of stannic oxide are present in this study. Sensor properties of the SnO2 layers greatly depend on a stage of tin layer rheotaxial growth. Observations of tin layer surface made after the process of rheotaxial growth and the SnO2 surface on the oxidation stage performed by means of a scanning electron microscope permitted drawing of many substantial conclusions regarding technology of production. The worked out technology made it possible to form sensor structures, which were next measured. This study provides a fragment of a wide research project over preparation and characterization of thin sensory layers made from stannic oxide and accomplished at the Institute of Physics and Institute of Electronics, Silesian Technical University.

Paper Details

Date Published: 8 August 2001
PDF: 6 pages
Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); doi: 10.1117/12.435943
Show Author Affiliations
Jerzy Uljanow, Silesian Univ. of Technology (Poland)
Krzysztof Waczynski, Silesian Univ. of Technology (Poland)
Adam Broja, Silesian Univ. of Technology (Poland)
Teresa Karczewska-Buczek, Silesian Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 4516:
Optoelectronic and Electronic Sensors IV

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