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Proceedings Paper

Compensation of convex corners in sensors with bossed structure etched in TMAH and TMAH+IPA solutions
Author(s): Irena Barycka; Jan Dziuban; Malgorzata Kramkowska; Irena Zubel
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Paper Abstract

Under etching of convex corners during the fabrication process of pressure sensor with the 'bossed' type structure seriously deteriorates parameters of these devices. The problem can be solved by application of properly designed masks with compensating corners.

Paper Details

Date Published: 8 August 2001
PDF: 10 pages
Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); doi: 10.1117/12.435942
Show Author Affiliations
Irena Barycka, Wroclaw Univ. of Technology (Poland)
Jan Dziuban, Wroclaw Univ. of Technology (Poland)
Malgorzata Kramkowska, Wroclaw Univ. of Technology (Poland)
Irena Zubel, Wroclaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 4516:
Optoelectronic and Electronic Sensors IV
Jerzy Fraczek, Editor(s)

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