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Proceedings Paper

Silicon components for gas chromatograph
Author(s): Jan Dziuban; Anna Gorecka-Drzazga; Krzysztof Malecki; Lukasz Nieradko; Jerzy Mroz; Malgorzata Szczygielska
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Paper Abstract

A gas analyzer based on chromatography method using silicon- glass components has been built. Its main components were made by using MAMS-like technology, and its conception is concurrent to the idea of an integrated silicon chromatography proposed by SC Terry.

Paper Details

Date Published: 8 August 2001
PDF: 9 pages
Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); doi: 10.1117/12.435932
Show Author Affiliations
Jan Dziuban, Technical Univ. of Wroclaw (Poland)
Anna Gorecka-Drzazga, Technical Univ. of Wroclaw (Poland)
Krzysztof Malecki, Technical Univ. of Wroclaw (Poland)
Lukasz Nieradko, Technical Univ. of Wroclaw (France)
Jerzy Mroz, Ctr. of Mining Electrification and Automation (Poland)
Malgorzata Szczygielska, Ctr. of Mining Electrification and Automation (Poland)


Published in SPIE Proceedings Vol. 4516:
Optoelectronic and Electronic Sensors IV

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