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Proceedings Paper

Application of dielectric layers made in sol-gel technique in the technology of planar waveguide sensors
Author(s): Pawel Karasinski
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Paper Abstract

The work discusses the application potentials of sol-gel technique in the technology of planar waveguide sensor. The capability to form refractive profiles with the use of various techniques applied in planar optics have been compared. The authors present the results of investigation studies involving the application of sol-gel technique of the oxide system SiO2:TiO2 for the formation of sensor layers, mask layers and waveguide layers. The influence of the thickness of waveguide layer and of its refractive index on the sensitivity of the meter measuring the refractive index changes an working in the difference interferometer system has been investigated.

Paper Details

Date Published: 8 August 2001
PDF: 6 pages
Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); doi: 10.1117/12.435923
Show Author Affiliations
Pawel Karasinski, Silesian Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 4516:
Optoelectronic and Electronic Sensors IV

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