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Proceedings Paper

Novel technological and constructional solutions of pressure sensors made in LTCC technology
Author(s): Leszek J. Golonka; Andrzej Dziedzic; Henryk Roguszczak; Szymon Tankiewicz; Damian Terech
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Paper Abstract

This paper describes the design, technology aspects and exploitation parameters of thick film pressure sensors manufactured in LTCC technology.

Paper Details

Date Published: 8 August 2001
PDF: 5 pages
Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); doi: 10.1117/12.435912
Show Author Affiliations
Leszek J. Golonka, Wroclaw Univ. of Technology (Poland)
Andrzej Dziedzic, Wroclaw Univ. of Technology (Poland)
Henryk Roguszczak, Wroclaw Univ. of Technology (Poland)
Szymon Tankiewicz, Wroclaw Univ. of Technology (Poland)
Damian Terech, Wroclaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 4516:
Optoelectronic and Electronic Sensors IV

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