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Proceedings Paper

Theoretical and experimental optimization of numerical aperture and partial coherence for complementary phase-shift processes
Author(s): Colin J. Brodsky; Carla Nelson-Thomas; Nigel Cave; John L. Sturtevant
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Paper Details

Date Published: 14 September 2001
PDF: 7 pages
Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); doi: 10.1117/12.435774
Show Author Affiliations
Colin J. Brodsky, Motorola (United States)
Carla Nelson-Thomas, Motorola (United States)
Nigel Cave, Motorola (United States)
John L. Sturtevant, Motorola (United States)


Published in SPIE Proceedings Vol. 4346:
Optical Microlithography XIV
Christopher J. Progler, Editor(s)

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