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Proceedings Paper

Patterning 80-nm gates using 248-nm lithography: an approach for 0.13-um VLSI manufacturing
Author(s): Chien-Ming Wang; Chien-Wen Lai; Jason H. Huang; Hua-Yu Liu
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Paper Abstract

We have developed an 80nm poly gate patterning process for 0.13 micrometers VLSI manufacturing using 248nm lithography with double-exposure phase-shifting technique. We show that: Systematic intra-field line width variation can be controlled within 6nm (3(sigma) ), and total wafer variation across the wafer held to within 10nm (3(sigma) ), with good line-end shortening control for gate endcaps. The k1 factor is < 0.2 (80nm target gate length in 320nm pitch).

Paper Details

Date Published: 14 September 2001
PDF: 12 pages
Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); doi: 10.1117/12.435745
Show Author Affiliations
Chien-Ming Wang, United Microelectronics Corp. (Taiwan)
Chien-Wen Lai, United Microelectronics Corp. (Taiwan)
Jason H. Huang, Numerical Technologies, Inc. (United States)
Hua-Yu Liu, Numerical Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 4346:
Optical Microlithography XIV
Christopher J. Progler, Editor(s)

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