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Proceedings Paper

Br lamp for F2 laser wavelength calibration
Author(s): Masaki Yoshioka; Tetsuya Kitagawa; Tomoyoshi Arimoto; Hiromitsu Matsuno; Tatsumi Hiramoto; Toru Suzuki; Kazuaki Hotta
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Paper Abstract

Recently, we have developed a novel Br lamp for the F2 laser wavelength calibration. In order to examine the validity of this lamp, we measured emission lines of this lamp in 157 nm region and analyzed them. From our result, it has been confirmed that the spectral profile of the 157.6387 nm (2P3/2 - 4P5/2) emission line of Br atom is unchangeable to the parameters of lamp designs and lamp operating conditions. One of the reasons will be shown here. Hence our novel Br lamp is to be the promising candidate for the 157 nm F2 laser wavelength calibration.

Paper Details

Date Published: 14 September 2001
PDF: 6 pages
Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); doi: 10.1117/12.435659
Show Author Affiliations
Masaki Yoshioka, Association of Super-Advanced Electronics Technologies (ASET) (Japan)
Tetsuya Kitagawa, USHIO Inc. (Japan)
Tomoyoshi Arimoto, USHIO Inc. (Japan)
Hiromitsu Matsuno, USHIO Inc. (Japan)
Tatsumi Hiramoto, USHIO Inc. (Japan)
Toru Suzuki, Gigaphoton, Inc. (Japan)
Kazuaki Hotta, Association of Super-Advanced Electronics Technologies (ASET) (Japan)

Published in SPIE Proceedings Vol. 4346:
Optical Microlithography XIV
Christopher J. Progler, Editor(s)

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