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Proceedings Paper

High-performance surface acoustic wave sensors for liquid environments
Author(s): Manfred Weihnacht; Falk Herrmann
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Paper Abstract

Acoustic wave devices based on waveguide modes with shear-horizontal polarisation, i. e. Love modes, are very promising for sensor application, especially in liquid environments. They can be used for determination of liquid density and viscosity as well as for chemical sensors. Up to now, several systems have been reported based on standard ST-quartz. Those devices lack temperature stability which is essential for field application. However, appropriate combinations of crystal cut angle and SiO2 overlay thickness should provide temperature compensation. Thus, different systems based on Y-rot quartz and lithium tantalate plates with SiO2 waveguiding films have been investigated. Temperature behavior as well as relevant acoustic properties are compiled. It has been proven that numerical calculations yield a very accurate description of the physical device properties. For both cases of material combinations it has been shown that systems are available combining temperature compensation with a high device sensitivity.

Paper Details

Date Published: 24 July 2001
PDF: 8 pages
Proc. SPIE 4335, Advanced Nondestructive Evaluation for Structural and Biological Health Monitoring, (24 July 2001); doi: 10.1117/12.434183
Show Author Affiliations
Manfred Weihnacht, Institute for Solid State and Materials Research (Germany)
Falk Herrmann, Robert Bosch Corp. (United States)

Published in SPIE Proceedings Vol. 4335:
Advanced Nondestructive Evaluation for Structural and Biological Health Monitoring
Tribikram Kundu, Editor(s)

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