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Proceedings Paper

Active microvibration control of precision manufacturing factories with smart structure using piezoelectric actuators
Author(s): Takafumi Fujita; Masahito Enomoto; Takeo Arikabe; Tomohiro Ogawa; Nobuyoshi Murai; Yoshiyuki Hashimoto; Hiroki Hamaguchi; Takashi Kitahara
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Paper Abstract

In order to achieve more perfect vibration-free environment in precision manufacturing facilities such as semiconductor manufacturing factories, and apply steel frame structures to semiconductor manufacturing factories of the next generation, a smart structure was tested for active microvibration control of a 2-story steel frame building model of a 5 X 3 X 4H m outer size and a 2,500 kg total weight which was excited by ambient ground vibration. In the structure, piezoelectric actuators attached to the columns and the beams were used for the microvibration control by bending moment control of them. The controller was designed using the H-infinity control theory. The tests showed that the smart structure could effectively reduce the 3D microvibration of the building model, and its applicability to floors and even entire buildings of semiconductor manufacturing factories having steel frame structures.

Paper Details

Date Published: 30 July 2001
PDF: 11 pages
Proc. SPIE 4330, Smart Structures and Materials 2001: Smart Systems for Bridges, Structures, and Highways, (30 July 2001); doi: 10.1117/12.434145
Show Author Affiliations
Takafumi Fujita, Univ. of Tokyo (Japan)
Masahito Enomoto, Univ. of Tokyo (Japan)
Takeo Arikabe, Sumitomo Heavy Industries, Ltd. (Japan)
Tomohiro Ogawa, Sumitomo Heavy Industries, Ltd. (Japan)
Nobuyoshi Murai, Takenaka Corp. (Japan)
Yoshiyuki Hashimoto, Takenaka Corp. (Japan)
Hiroki Hamaguchi, Takenaka Corp. (Japan)
Takashi Kitahara, Hitachi Plant Engineering and Construction Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 4330:
Smart Structures and Materials 2001: Smart Systems for Bridges, Structures, and Highways
S.-C. Liu, Editor(s)

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