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Proceedings Paper

Influence of a-Si:H buffer layers on the properties of CNx materials
Author(s): B. Mitu; Gheorghe H. Dinescu; E. Aldea; Maria Dinescu; A. Ferrari; M. Balucani; G. Lamedica
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Paper Abstract

On the basis of ab initio calculations, the (alpha) , (beta) - C3N4 crystalline compounds have been proposed as promising materials for optical applications in ultraviolet and visible. However, these crystalline forms of carbon nitride have been hardly obtained, mostly the formation of amorphous material being noticed. Previously, deposition of amorphous carbon nitride from an RF plasma jet operating in nitrogen with graphite electrodes was reported. This work reports on the deposition and characterization of carbon nitride thin films by RF nitrogen plasma beam with graphite electrodes either on glass on crystalline Si or on intermediate a-Si:H buffer layers. The layers properties (composition, crystallinity and absorption in ultraviolet, visible and infrared) have been studied by x-ray photoelectron spectroscopy (XPS), FTIR (Fourier transform infrared spectroscopy) and UV-VIS absorption, energy dispersive x-ray analysis (EDX) and x-ray diffraction (XRD) techniques. It is shown that amorphous carbon nitride materials with variable optical bandgap in the range 1.2-3.5 eV can be obtained. Also, the formation of an intermediate SiCN interlayer and the promotion of crystallinity in CNx films, due to buffer layer presence, is proved.

Paper Details

Date Published: 29 June 2001
PDF: 6 pages
Proc. SPIE 4430, ROMOPTO 2000: Sixth Conference on Optics, (29 June 2001); doi: 10.1117/12.432920
Show Author Affiliations
B. Mitu, National Institute for Laser, Plasma and Radiation Physics (Romania)
Gheorghe H. Dinescu, National Institute for Laser, Plasma and Radiation Physics (Romania)
E. Aldea, National Institute for Laser, Plasma and Radiation Physics (Romania)
Maria Dinescu, National Institute for Laser, Plasma and Radiation Physics (Romania)
A. Ferrari, Univ. degli Studi di Roma La Sapienza (Italy)
M. Balucani, Univ. degli Studi di Roma La Sapienza (Italy)
G. Lamedica, Univ. degli Studi di Roma La Sapienza (Italy)


Published in SPIE Proceedings Vol. 4430:
ROMOPTO 2000: Sixth Conference on Optics

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