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Proceedings Paper

Surface modification of aluminum alloy 2024-T3 via femtosecond pulse laser irradiation
Author(s): Kai Dou; Robert L. Parkhill; Kenneth H. Church; Edward T. Knobbe
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Paper Abstract

Surface modification of aluminum alloy 2024-T3 using femtosecond pulsed excimer laser irradiation was studied at 248 nm. The images of the scanning electron microscopy (SEM) were characterized as a function of incident laser fluence. Results indicated that the surface features, ranging from nano- to microdimension, can be developed through variation in laser fluence intensities and pulse counts. Two ablation regimes in the logarithmic fluence dependence of the ablated depth for the 500 fs-pulse irradiation were observed. The theoretical analysis for ablation processes is in a good agreement with the experimental results.

Paper Details

Date Published: 29 June 2001
PDF: 10 pages
Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432551
Show Author Affiliations
Kai Dou, Oklahoma State Univ. (United States)
Robert L. Parkhill, CMS Technetronics, Inc. (United States)
Kenneth H. Church, CMS Technetronics, Inc. (United States)
Edward T. Knobbe, Oklahoma State Univ. (United States)


Published in SPIE Proceedings Vol. 4274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Malcolm C. Gower; Henry Helvajian; Koji Sugioka; Jan J. Dubowski, Editor(s)

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