Share Email Print
cover

Proceedings Paper

Capacitive discharge excilamps with short duration of radiation pulse
Author(s): Victor F. Tarasenko; Mikhail V. Erofeev; Mikhail I. Lomaev; Edward A. Sosnin; Dmitrii V. Shitz
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Power characteristics of four excilamps with short-pulse duration discharge plasma radiation have been investigated experimentally. At mixture pressure of 30 Torr the radiation pulse power density has made at (lambda) approximately 222 nm 0.2 kW/cm2, 0.15 kW/cm2, 0.09 kW/cm2 for I-, H- and L-type excilamps, respectively. The maximal radiation pulse power density was received for modernized I-type excilamp and it has made 0.3 kW/cm2. It has been revealed that pulse radiation output is mostly determined by excilamp voltage value, discharge geometry, value of peaking capacitance, and gas medium density.

Paper Details

Date Published: 29 June 2001
PDF: 6 pages
Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432545
Show Author Affiliations
Victor F. Tarasenko, High Current Electronics Institute (Russia)
Mikhail V. Erofeev, High Current Electronics Institute (Russia)
Mikhail I. Lomaev, High Current Electronics Institute (Russia)
Edward A. Sosnin, High Current Electronics Institute (Russia)
Dmitrii V. Shitz, High Current Electronics Institute (Russia)


Published in SPIE Proceedings Vol. 4274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Malcolm C. Gower; Henry Helvajian; Koji Sugioka; Jan J. Dubowski, Editor(s)

© SPIE. Terms of Use
Back to Top