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Proceedings Paper

Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation
Author(s): Taras V. Kononenko; Sergei M. Klimentov; Vitali I. Konov; P. A. Pivovarov; Serge V. Garnov; Friedrich Dausinger; Detlef Breitling
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Paper Abstract

Experiments on deep drilling of steel by 300 ps, 1 ps and 125 fs laser pulses are reported. The ablation rate dependence on the channel depth was studied and energy losses in through channels for different radiation parameters were measured. The low-threshold cluster-assisted air breakdown was revealed to play an important role in ablation by 300 ps pulses. The ablated particles remaining inside the channel between laser shots provide substantial reduction of the air breakdown threshold. Laser-induced spark produces noticeable shielding effect and, presumably, is main reason of observed deep channel widening. Pronounced strengthening of light shielding by laser-induced spark was observed under steel target ablation comparing with pure air without target for ultrashort (125 fs, 1 ps) laser pulses. The dramatic reduction of the drilling rate in deep channels was observed for all examined pulsewidths. In the case of 300 ps pulses, the drilling rate falls down sharply by two order of magnitude at a certain critical channel depth increasing with the incident laser fluence. It was found that the integral plasma transmittance (breakdown plus ablation) remains unchanged when the drilling rate decreases.

Paper Details

Date Published: 29 June 2001
PDF: 10 pages
Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432516
Show Author Affiliations
Taras V. Kononenko, General Physics Institute (Russia)
Sergei M. Klimentov, General Physics Institute (Russia)
Vitali I. Konov, General Physics Institute (Russia)
P. A. Pivovarov, General Physics Institute (Russia)
Serge V. Garnov, General Physics Institute (Russia)
Friedrich Dausinger, Univ. Stuttgart (Germany)
Detlef Breitling, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 4274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Malcolm C. Gower; Henry Helvajian; Koji Sugioka; Jan J. Dubowski, Editor(s)

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