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Proceedings Paper

Submicron structuring of solid targets with femtosecond laser pulses
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Paper Abstract

Possibilities to fabricate sub-micron structures in thin metal films, metal coatings, and glass substrates using femtosecond laser pulses are systematically studied. Structures are produced by direct femtosecond-pulse laser ablation of solid targets at atmospheric pressure. Tight focusing and imaging techniques are applied. Dependencies of the structure size on laser pulse energy and pulse number are investigated.

Paper Details

Date Published: 29 June 2001
PDF: 6 pages
Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432502
Show Author Affiliations
Frank Korte, Laser Zentrum Hannover e.V. (Germany)
Stefan Nolte, Friedrich-Schiller-Univ. Jena (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)
Carsten Fallnich, Laser Zentrum Hannover e.V. (Germany)
Andreas Tuennermann, Friedrich-Schiller-Univ. Jena (Germany)
Herbert Welling, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 4274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Malcolm C. Gower; Henry Helvajian; Koji Sugioka; Jan J. Dubowski, Editor(s)

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