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Proceedings Paper

Display matrix of three-electrode active MDMDM elements
Author(s): A. I. Vorobyova; E. A. Outkina
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Paper Abstract

The layout features of the developed display matrix of three-electrode active MDMDM-elements are represented. The design of the matrix includes the grid of orthogonal electrodes, at intersections of which the driving active elements are placed. The emitter layer is formed by vacuum deposition of Ta/Al films and subsequent selective electrochemical anodization using photoresistive mask. The conductive paths between the emitter and collector layers are formed as Ta2O5 anodic oxide pillars of 100 to 600 nm height and 30 to 120 nm diameter.

Paper Details

Date Published: 28 June 2001
PDF: 3 pages
Proc. SPIE 4511, Advanced Display Technologies: Basic Studies of Problems in Information Display (FLOWERS 2000), (28 June 2001); doi: 10.1117/12.431263
Show Author Affiliations
A. I. Vorobyova, Belarussian State Univ. of Informatics and Radioelectronics (Belarus)
E. A. Outkina, Belarussian State Univ. of Informatics and Radioelectronics (Belarus)


Published in SPIE Proceedings Vol. 4511:
Advanced Display Technologies: Basic Studies of Problems in Information Display (FLOWERS 2000)
Victor V. Belyaev; Igor N. Kompanets, Editor(s)

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