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Proceedings Paper

Peculiarity of CO2 laser radiation interaction with semiconductor AIIBVI compounds
Author(s): Anel F. Mukhammedgalieva; V. S. Petukhov; B. I. Vasiliev
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Paper Abstract

Under the impact of powerful laser radiation in semiconductors occur processes, essentially change their properties. For instance, in (1) observed annealing of ion- implanted silicon, vastly improving quality of semiconductor devices, made form it. In (2) was observed laser-stimulated diffusion of impurity atoms on the direction to surface, and in (3) on the contrary, deep into the semiconductor. In (4) an increase of velocity of chemical reactions on semiconductor surface under the influence of laser radiation was observed. In the present work spectra of radiation reflection of low power continuous CO2-laser from the surface of monocrystals of semiconductor AII BVI compounds previously irradiated by powerful pulses of CO2 laser were investigated.

Paper Details

Date Published: 26 June 2001
PDF: 7 pages
Proc. SPIE 4423, Nonresonant Laser-Matter Interaction (NLMI-10), (26 June 2001); doi: 10.1117/12.431214
Show Author Affiliations
Anel F. Mukhammedgalieva, Moscow State Mining Univ. (Russia)
V. S. Petukhov, Moscow State Mining Univ. (Russia)
B. I. Vasiliev, Moscow State Mining Univ. (Russia)

Published in SPIE Proceedings Vol. 4423:
Nonresonant Laser-Matter Interaction (NLMI-10)
Mikhail N. Libenson, Editor(s)

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