Share Email Print
cover

Proceedings Paper

Model of a microminiaturized pressure sensor with optical output
Author(s): Engelbert Hartl; Elena Lavitska; Christoph Schmidtlein
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The main steps on the way of practical realization of a microminiaturized Fabry-Perot pressure sensor with a micromachined silicon membrane are presented and discussed. Starting from the mathematical model and FEM-based simulation through the experimental check of operation principle using the scaled sensor model we came to the discussion on technological problems and first results on their solving.

Paper Details

Date Published: 12 June 2001
PDF: 7 pages
Proc. SPIE 4425, Selected Papers from the International Conference on Optoelectronic Information Technologies, (12 June 2001); doi: 10.1117/12.429776
Show Author Affiliations
Engelbert Hartl, Georg-Simon Ohm Fachhochschule (Germany)
Elena Lavitska, Lviv Polytechnic State Univ. (Ukraine)
Christoph Schmidtlein, Georg-Simon Ohm Fachhochschule (Germany)


Published in SPIE Proceedings Vol. 4425:
Selected Papers from the International Conference on Optoelectronic Information Technologies

© SPIE. Terms of Use
Back to Top