Share Email Print

Proceedings Paper

ELITE-3 active vibration isolation workstation
Author(s): Eric H. Anderson; Bowie Houghton
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper describes the development and capabilities of ELITE-3, a product that incorporates piezoelectric actuators to provide ultrastable work surfaces for very high resolution wafer production, metrology, microscopy, and other applications. The electromechanical, electronic, and software/firmware parts of the ELITE-3 active workstation are described, with an emphasis on considerations relating to the piezoelectric transducers. Performance of the system and its relation to the smart materials is discussed. As the floor beneath a vibration-sensitive instrument supported by ELITE-3 moves, piezoelectrics are controlled to minimize the motion of the instrument. A digital signal processor (DSP) determines the appropriate signals to apply to the actuators. A PC-based interface allows reprogramming of control algorithms and resetting of other parameters within the firmware. The modular product allows incorporation of vibration isolator, actuator and sensor modules into original equipment manufacturer (OEM) products. Alternatively, a workstation can be integrated as an integrated standalone system. The paper describes the system architecture, overall approach to vibration isolation, and various system components, and summarizes motivations for key design approaches.

Paper Details

Date Published: 14 June 2001
PDF: 14 pages
Proc. SPIE 4332, Smart Structures and Materials 2001: Industrial and Commercial Applications of Smart Structures Technologies, (14 June 2001); doi: 10.1117/12.429656
Show Author Affiliations
Eric H. Anderson, CSA Engineering, Inc. (United States)
Bowie Houghton, Newport Corp. (United States)

Published in SPIE Proceedings Vol. 4332:
Smart Structures and Materials 2001: Industrial and Commercial Applications of Smart Structures Technologies
Anna-Maria Rivas McGowan, Editor(s)

© SPIE. Terms of Use
Back to Top