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Proceedings Paper

Evaluation of microbeam deflection using interferometry
Author(s): S. H. Wang; Cho Jui Tay; Chenggen Quan; Huai Min Shang
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Paper Abstract

Current trends in the miniaturization of MEMS require the use of increasingly smaller components. MEMS has already offered challenging opportunities for improving test techniques. In this paper we have developed a technique for testing deflections of a micro-beam in an accelerometer under point-force load. The technique is based on light interferometry. A collimated monochomatic light is direct ed into an air-wedge consists of an optical flat and a micro- beam. A long distance microscope with a CCD camera is utilized to capture the interference fringe pattern which results from recombination of two-beam reflected from the optical flat and the micro-beam. The resulting fringe patterns are analyzed by the use of FFT and deflections of the micro-beam are obtained. The experimental results show that the proposed technique is relatively simple and accurate, and is a potential method for conducting measurement on micro-components.

Paper Details

Date Published: 13 June 2001
PDF: 6 pages
Proc. SPIE 4317, Second International Conference on Experimental Mechanics, (13 June 2001); doi: 10.1117/12.429583
Show Author Affiliations
S. H. Wang, National Univ. of Singapore (Singapore)
Cho Jui Tay, National Univ. of Singapore (Singapore)
Chenggen Quan, National Univ. of Singapore (Singapore)
Huai Min Shang, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 4317:
Second International Conference on Experimental Mechanics
Fook Siong Chau; Chenggen Quan, Editor(s)

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