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Proceedings Paper

3D modeling from AFM measurements
Author(s): Timothee Jost; Heinz Huegli
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Paper Abstract

There exist many techniques for the measurement of micro and nano surfaces and also several conventional ways to represent the resulting data, such as pseudo color or isometric 3D. This paper addresses the problem of building complete 3D micro-object models from measurements in the submicrometric range. More specifically, it considers measurements provided by an atomic-force microscope and investigates their possible use for the modeling of small 3D objects. The general approach for building complete virtual models requires to measure and merge several data sets representing the considered object observed under different orientations, or views.

Paper Details

Date Published: 5 June 2001
PDF: 10 pages
Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001); doi: 10.1117/12.429364
Show Author Affiliations
Timothee Jost, Univ. of Neuchatel (Switzerland)
Heinz Huegli, Univ. of Neuchatel (Switzerland)


Published in SPIE Proceedings Vol. 4275:
Metrology-based Control for Micro-Manufacturing
Kenneth W. Tobin; Fred Lakhani, Editor(s)

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