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Proceedings Paper

Integrated high-speed GaAs MSM photodetector and polyimide channel waveguide array for board-level data communication
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Paper Abstract

A demonstration of hybrid integration of a 1 X 12 metal- semiconductor-metal (MSM) photo-detector array and polyimide channel waveguides via 45 degree(s) total-internal-reflection micro-coupler is reported here. MSM photo-detector array was fabricated on a semi-insulated GaAs wafer. The two-layer polyimide waveguide array was constructed using Ultradel 9120D for core and Ultradel 9020 for lower cladding layer. The photodetectors are integrated to operate in the conventional vertical illumination mode. We have measured the external quantum-efficiency and 3 dB bandwidth of the integrated MSM photo-detectors to be 0.4 A/W and 2.648 GHz, respectively. The aggregate 3 dB bandwidth of the 12-channel integrated system is 32 GHz.

Paper Details

Date Published: 30 May 2001
PDF: 7 pages
Proc. SPIE 4292, Optoelectronic Interconnects VIII, (30 May 2001); doi: 10.1117/12.428029
Show Author Affiliations
Lei Lin, Univ. of Texas at Austin (United States)
Yujie Liu, Univ. of Texas at Austin (United States)
Chulchae Choi, Univ. of Texas at Austin (United States)
Bipin Bihari, Univ. of Texas at Austin (United States)
Ray T. Chen, Univ. of Texas at Austin (United States)

Published in SPIE Proceedings Vol. 4292:
Optoelectronic Interconnects VIII
Suning Tang; Yao Li, Editor(s)

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