Share Email Print
cover

Proceedings Paper

Thin film polymeric waveguide beam deflector based on thermo-optic effect
Author(s): Chiou-Hung Jang; Lin Sun; Jin-ha Kim; Suning Tang; Bulang Li; Xinghua Han; Xuejun Lu; John Martin Taboada; Dechang An; Qingjun Zuo; Ray T. Chen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, we demonstrate a thin-film polymeric waveguide beam deflector using a new device concept, an electrode of prism-array pattern on top of a three-layer planar waveguide. The three-layer planar waveguide was composed of UV15 as the top cladding layer, a polyimide as the core layer, and SiO2 as the bottom cladding layer on a silicon substrate. A gold layer was deposited on the top of the waveguide by e-beam deposition and then patterned into a prism-array as the heating electrode by photolithography.

Paper Details

Date Published: 30 May 2001
PDF: 8 pages
Proc. SPIE 4292, Optoelectronic Interconnects VIII, (30 May 2001); doi: 10.1117/12.428025
Show Author Affiliations
Chiou-Hung Jang, Univ. of Texas at Austin (United States)
Lin Sun, Univ. of Texas at Austin (United States)
Jin-ha Kim, Univ. of Texas at Austin (United States)
Suning Tang, Radiant Research, Inc. (United States)
Bulang Li, Radiant Research, Inc. (United States)
Xinghua Han, Radiant Research, Inc. (United States)
Xuejun Lu, Univ. of Texas at Austin (United States)
John Martin Taboada, Univ. of Texas at Austin (United States)
Dechang An, Univ. of Texas at Austin (United States)
Qingjun Zuo, Univ. of Texas at Austin (United States)
Ray T. Chen, Univ. of Texas at Austin (United States)


Published in SPIE Proceedings Vol. 4292:
Optoelectronic Interconnects VIII
Suning Tang; Yao Li, Editor(s)

© SPIE. Terms of Use
Back to Top