Share Email Print
cover

Proceedings Paper

Novel techniques for microscopic imaging of semiconductor surfaces
Author(s): Vladislav V. Yakovlev; Katerina Mikhailichenko; Sergei V. Govorkov
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We develop several new optical techniques for microscopic semiconductor diagnostics and use them for inspection of semiconductor surfaces. Short-pulse lasers (femtosecond Ti:sapphire and Cr4+:forsterite) are used for nonlinear optical studies.

Paper Details

Date Published: 29 May 2001
PDF: 8 pages
Proc. SPIE 4276, Commercial and Biomedical Applications of Ultrashort Pulse Lasers; Laser Plasma Generation and Diagnostics, (29 May 2001); doi: 10.1117/12.428011
Show Author Affiliations
Vladislav V. Yakovlev, Univ. of Wisconsin/Milwaukee (United States)
Katerina Mikhailichenko, Lam Research Corp. (United States)
Sergei V. Govorkov, Lambda Physik, Inc. (United States)


Published in SPIE Proceedings Vol. 4276:
Commercial and Biomedical Applications of Ultrashort Pulse Lasers; Laser Plasma Generation and Diagnostics
Richard F. Haglund; Richard F. Haglund; Richard F. Wood; Joseph Neev; Richard F. Wood, Editor(s)

© SPIE. Terms of Use
Back to Top