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Proceedings Paper

Novel techniques for microscopic imaging of semiconductor surfaces
Author(s): Vladislav V. Yakovlev; Katerina Mikhailichenko; Sergei V. Govorkov
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Paper Abstract

We develop several new optical techniques for microscopic semiconductor diagnostics and use them for inspection of semiconductor surfaces. Short-pulse lasers (femtosecond Ti:sapphire and Cr4+:forsterite) are used for nonlinear optical studies.

Paper Details

Date Published: 29 May 2001
PDF: 8 pages
Proc. SPIE 4276, Commercial and Biomedical Applications of Ultrashort Pulse Lasers; Laser Plasma Generation and Diagnostics, (29 May 2001); doi: 10.1117/12.428011
Show Author Affiliations
Vladislav V. Yakovlev, Univ. of Wisconsin/Milwaukee (United States)
Katerina Mikhailichenko, Lam Research Corp. (United States)
Sergei V. Govorkov, Lambda Physik, Inc. (United States)


Published in SPIE Proceedings Vol. 4276:
Commercial and Biomedical Applications of Ultrashort Pulse Lasers; Laser Plasma Generation and Diagnostics
Richard F. Haglund; Joseph Neev; Richard F. Wood; Richard F. Haglund; Richard F. Wood, Editor(s)

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