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Proceedings Paper

Integrated microchip-based nanoelectrospray device for high-throughput mass spectrometry
Author(s): Thomas N. Corso; Colleen K. Van Pelt; Sheng Zhang; Simon J. Prosser; Gary A. Schultz
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Paper Abstract

The emerging field of microfluidics may provide for the rapid, automated analysis of samples. Here we describe the microfabrication and operation of a nanoelectrospray device formed from the planar surface of a monolithic silicon substrate for electrospray mass spectrometry sample analysis at low nanoliter per minute flow rates. To generate a useful electrospray from a microchip, a high aspect ratio nozzle structure of small dimensions is required. Deep reactive ion etching technologies allow these high aspect ratio structures to be fabricated in parallel and are widely available for the etching of silicon.

Paper Details

Date Published: 21 May 2001
PDF: 10 pages
Proc. SPIE 4265, Biomedical Instrumentation Based on Micro- and Nanotechnology, (21 May 2001); doi: 10.1117/12.427960
Show Author Affiliations
Thomas N. Corso, Advanced BioAnalytical Services, Inc. (United States)
Colleen K. Van Pelt, Advanced BioAnalytical Services, Inc. (United States)
Sheng Zhang, Advanced BioAnalytical Services, Inc. (United States)
Simon J. Prosser, Advanced BioAnalytical Services, Inc. (United States)
Gary A. Schultz, Advanced BioAnalytical Services, Inc. (United States)


Published in SPIE Proceedings Vol. 4265:
Biomedical Instrumentation Based on Micro- and Nanotechnology
Raymond P. Mariella; Dan V. Nicolau, Editor(s)

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