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Proceedings Paper

Nanometer science and technology (Viewgraphs Only)
Author(s): James Murday
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Paper Details

Date Published: 24 July 2002
PDF: 32 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.427109
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Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology
Martin C. Peckerar; Michael T. Postek, Editor(s)

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