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Proceedings Paper

High-speed sinusoidal phase-modulating laser diode interferometer with a feedback control to eliminate external disturbance
Author(s): Takamasa Suzuki; Toshiyuki Maki; Osami Sasaki
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Paper Abstract

A surface profiler incorporating a feedback controller that eliminates external disturbances is proposed and demonstrated. Its overall performance is dependent upon the frequency response of the feedback loop. The frequency of modulating signal strongly influences response of the feedback controller. When using an integrating bucket method, however, the CCD camera must be operated at the NTSC-approved modulating frequency. Our technique uses electronic shutter equipped CCD camera. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating bucket method under the NTSC standards.

Paper Details

Date Published: 8 May 2001
PDF: 4 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427093
Show Author Affiliations
Takamasa Suzuki, Niigata Univ. (Japan)
Toshiyuki Maki, Niigata Univ. (Japan)
Osami Sasaki, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)

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