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Proceedings Paper

Self-aligned microtool and electrochemical discharge machining (ECDM) for ceramic materials
Author(s): Hyung Jun Lim; Young Mo Lim; Soo Hyun Kim; Yoon Keun Kwak
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Paper Abstract

Ceramic is an important material for electrical engineering fields because it has high creep, chemical, and temperature resistances. MEMS technology sometimes needs transparency and chemical resistance, so glass is often used. As the system size becomes smaller and smaller, however, it is impossible to machine such materials by conventional methods because they are hard and brittle. Some unconventional methods are suitable for non-conducting ceramic materials regardless of their properties of hardness, toughness, and brittleness. Electrochemical discharge machining (ECDM) is one of the unconventional methods for ceramic materials. However, ECDM usually requires tools fabricated by other machining. As the machining size becomes smaller, the coordinate system of the tool tip can be easily changed when we fix or replace the tools. This paper proposes a new machining system; the system has two fabrication modes. It makes a tungsten tool by electrochemical process (ECP), and then, ceramic materials are machined by ECDM with this tool. These two machining systems can be easily transformed from only one system by the regulation of the concentration of the electrolyte and the electric power controller. We illustrate and analyze some experimental results of the machining of tungsten tools and ceramic holes which have various geometric shapes.

Paper Details

Date Published: 8 May 2001
PDF: 6 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427083
Show Author Affiliations
Hyung Jun Lim, Korea Advanced Institute of Science and Technology (South Korea)
Young Mo Lim, Korea Institute of Science and Technology (South Korea)
Soo Hyun Kim, Korea Advanced Institute of Science and Technology (South Korea)
Yoon Keun Kwak, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
Koichi Iwata, Editor(s)

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