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Proceedings Paper

Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings
Author(s): Osami Sasaki; Kazunori Hashimoto; Yuuji Fujimori; Takamasa Suzuki
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Paper Abstract

We propose a new method for measuring a position of an endpoint of a metal cylinder in which a sinusoidal intensity distribution vibrating sinusoidally is used. The position of the endpoint is measured as a phase of a sinusoidally phase- modulated signal which is generated from a light diffracted from the endpoint. In order to extend the measurement range and measure a diameter of a metal cylinder two sinusoidal intensity distributions with two different periods of P1equals100 micrometers and P2equals98 micrometers are used. Cylinder diameters are exactly determined from the measurements for two endpoints of a cylinder using the two periods. Experimental results make it clear that the measurement error is less than 0.3 micrometers for a cylinder metal of 3885.2 micrometers diameter.

Paper Details

Date Published: 8 May 2001
PDF: 4 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427062
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Kazunori Hashimoto, Niigata Univ. (Japan)
Yuuji Fujimori, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
Koichi Iwata, Editor(s)

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