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Proceedings Paper

Phase-shifting interference microscopy using a Fresnel's biprism
Author(s): Jun Chen; Junji Endo; Yoshiaki Niino; Hiroyuki Fujita
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Paper Abstract

We present a new type of phase-shifting microscope that enables us to quantitatively measure the phase distribution of a transparent microscopic object. In this microscope, a Fresnel's biprism is used to make the object wave and a reference wave to interfere. The biprism is laterally moved by a piezoelectric transducer to produce the phase shift between the two waves required for phase extraction using the phase shifting technique. The diffraction caused by the vertex of the biprism is avoided by placing a thin wire at the center position of an intermediate image plane. The technique described here can be easily applied to an ordinary optical microscope, moreover, this technique can also be applied to an electron holographic interference microscope using an electron biprism. Experimental results for measuring the refractive index distribution of an optical waveguide are presented.

Paper Details

Date Published: 8 May 2001
PDF: 4 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427038
Show Author Affiliations
Jun Chen, Tokyo Institute of Polytechnics and Japan Science and Technology Corp. (Japan)
Junji Endo, Hitachi Ltd. and Japan Science and Technology Corp. (Japan)
Yoshiaki Niino, Tokyo Institute of Polytechnics (Japan)
Hiroyuki Fujita, Univ. of Tokyo and Japan Science and Technology Corp. (Japan)


Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
Koichi Iwata, Editor(s)

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