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Proceedings Paper

Stabilized phase-shifting fringe analysis using current-induced FM feature of laser diodes
Author(s): Masayuki Yokota; Atsuyoshi Asaka; Toshihiko T. Yoshino
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Paper Abstract

A closed loop phase shifting Fizeau-type interferometer is constructed by using the direct frequency modulation (FM) of a laser diode. The interferometer is servo controlled fully in the phase domain where optical phases are detected by a two-frequency optical heterodyne method. Detailed study on stabilization of the interferometer under feedback control is conducted both experimentally and theoretically. The interferometer showed a good stabilization against the applied vibration up to 200 Hz. The profile measurement of a mirror surface was conducted by the phase shifting analysis algorithm and a good measurement reproducibility of (lambda) /60 in the root mean square value was obtained for 10 times measurements in a period of 20 min.

Paper Details

Date Published: 8 May 2001
PDF: 4 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427035
Show Author Affiliations
Masayuki Yokota, Gunma Univ. (Japan)
Atsuyoshi Asaka, Gunma Univ. (Japan)
Toshihiko T. Yoshino, Gunma Univ. (Japan)

Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
Koichi Iwata, Editor(s)

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