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Proceedings Paper

High-sensitivity fiber optic Fabry-Perot pressure sensors for medical applications
Author(s): Ju Young Joung; Kyung Chan Kim; Insoo S. Kim; Jaehee Park
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Paper Abstract

The miniature fiber optic Fabry-Perot pressure sensor with a silicon diaphragm was developed for medical applications. The configuration of this sensor was a 1-mm long fiber optic Fabry-Perot interferometer bonded to an 80 micrometers -thick diaphragm. The length of the sensor was about 1.5 mm and the area of the diaphragm was 1 mm x 1 mm. The phase shift of the interferometric sensor was proportional to the applied pressure. The relationship between the applied pressure and the phase change was nonlinear.

Paper Details

Date Published: 8 May 2001
PDF: 4 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.426996
Show Author Affiliations
Ju Young Joung, Keimyung Univ. (South Korea)
Kyung Chan Kim, Keimyung Univ. (South Korea)
Insoo S. Kim, Korea Electrotechnology Research Institute (South Korea)
Jaehee Park, Keimyung Univ. (South Korea)


Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
Koichi Iwata, Editor(s)

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