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Proceedings Paper

Micro-moire methods: optical and scanning techniques
Author(s): Anand Krishna Asundi; Huimin Xie; Chongxiang Li; Chai Gin Boay; Kim Eng Oh
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Paper Abstract

Moire method is an effective way to measure full field deformation. In this paper, the atomic force microscope scanning moire method and micro-moire interferometry method are proposed to determine the deformation in micro-area. The measurement principle and techniques are discussed. The two methods are applied to measure thermal deformation in a BGA (ball grid array) electronic package component. The shear strain (gamma) xy at the solder site is determined. The experimental results including the adaptability of these two methods are compared and analyzed. The results show that AFM scanning moire and micro-moire interferometry methods are effective ways to measure the deformation in micro-area with high sensitivity.

Paper Details

Date Published: 8 May 2001
PDF: 4 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.426994
Show Author Affiliations
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Huimin Xie, Nanyang Technological Univ. (Singapore)
Chongxiang Li, Nanyang Technological Univ. (Singapore)
Chai Gin Boay, Nanyang Technological Univ. (Singapore)
Kim Eng Oh, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)

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