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Proceedings Paper

Spectral filtering for image sensors
Author(s): Caroline Bringolf; Patrice J.H. Twardowski; Pierre Blanchard; Herve Moutenet
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Paper Abstract

In order to design and realize multiple wavelength bandpass filters for image sensors, we have investigated optical multi-layer dielectric filters. The filter design is based on a chirped Bragg grating which is approximated by a stack of two alternatively deposited dielectric materials. Multi- layer stacks have been simulated with the rigorous chain- matrix method. The reflection and transmission coefficients of the stacks have been obtained by the multiplication of the respective 2 by 2 characteristics matrices of each layer. Moreover the period and chirping of the discrete chirped of the discrete chirped Bragg gratings have been optimized to match the blue spectral response. The filter band has been designed to transmit the 400-500nm wavelengths and to reflect the other visible spectrum wavelengths. Single layers of silicon oxide and silicon nitride have been deposited using a PECVD process. The characterization of these layers have been made by ellipsometry, and has led to a modification of the nitride deposition process to improve its optical characteristics. The compete stack has been deposited on a quartz substrate, and the reflectance and the transmittance have been measured. The next step is to improve the deposition process.

Paper Details

Date Published: 15 May 2001
PDF: 8 pages
Proc. SPIE 4306, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications II, (15 May 2001); doi: 10.1117/12.426973
Show Author Affiliations
Caroline Bringolf, Atmel-Grenoble (France)
Patrice J.H. Twardowski, Ecole Nationale Superieure de Physique de Strasbourg (France)
Pierre Blanchard, Atmel-Grenoble (France)
Herve Moutenet, Atmel-Grenoble (France)

Published in SPIE Proceedings Vol. 4306:
Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications II
Nitin Sampat; Morley M. Blouke; John Canosa; John Canosa; Nitin Sampat, Editor(s)

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