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Proceedings Paper

Chalcogenide three-dimensional photonic structures
Author(s): A. I. Feigel; Zvi Kotler; Bruno Sfez; A. Arsh; Matvei Klebanov; Victor Lyubin
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Paper Abstract

AsSeTe/AsSe chalcogenide glasses are photosensitive materials with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of 3D photonic crystals, composed from AsSeTe and air, with sub-micron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.

Paper Details

Date Published: 15 May 2001
PDF: 3 pages
Proc. SPIE 4277, Integrated Optics Devices V, (15 May 2001); doi: 10.1117/12.426829
Show Author Affiliations
A. I. Feigel, Soreq Nuclear Research Ctr. (Israel)
Zvi Kotler, Soreq Nuclear Research Ctr. (Israel)
Bruno Sfez, Soreq Nuclear Research Ctr. (Israel)
A. Arsh, Ben-Gurion Univ. of the Negev (Israel)
Matvei Klebanov, Ben-Gurion Univ. of the Negev (Israel)
Victor Lyubin, Ben-Gurion Univ. of the Negev (Israel)

Published in SPIE Proceedings Vol. 4277:
Integrated Optics Devices V
Giancarlo C. Righini; Seppo Honkanen, Editor(s)

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