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Proceedings Paper

Development of a fabrication process for plastic optical modules with nano-3D structures for communication
Author(s): Seiichiro Kitagawa; Yoichi Kotani; Makoto Okada; Kazuya Yamamoto
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Paper Abstract

In recent years, the demand for the high efficiency diffractive optical element is booming for large capacity storage devices. Instead of conventional lithographic approach to fabricate molds, we have developed a new technology utilizing an electron beam writer in order to produce molds used for injection modeling high-accuracy diffractive optical elements. Although we have already developed a technology to produce plastic diffractive elements, with the new technology we can produce blazed and relief features, which are not achievable through the conventional approach. By introducing a mathematical expression to give exact dosage necessary for particular depth from 0.7 to 1.3 micron ad from 1.5 to 5.0 microns pitch, high-accuracy nano-3D features can be controlled within +/- 50 nm in pitch and +/- 35 nm in depth. This blazed structure was designed to achieve 41 percent identical 0th and first order and the result is 39.0 percent for 0th and 37.9 percent for first order at 780 nm.

Paper Details

Date Published: 15 May 2001
PDF: 9 pages
Proc. SPIE 4277, Integrated Optics Devices V, (15 May 2001); doi: 10.1117/12.426827
Show Author Affiliations
Seiichiro Kitagawa, NALUX Co., Ltd. (Japan)
Yoichi Kotani, NALUX Co., Ltd. (Japan)
Makoto Okada, NALUX Co., Ltd. (Japan)
Kazuya Yamamoto, NALUX Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 4277:
Integrated Optics Devices V
Giancarlo C. Righini; Seppo Honkanen, Editor(s)

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