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Proceedings Paper

Optical and electron paramagnetic resonance studies of hydrogenated amorphous carbon (a-C:H) thin films formed by direct ion beam deposition method
Author(s): M. Silinskas; A. Grigonis; G. Dikcius; H. Manikowski
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Paper Abstract

The diamond-like carbon films, deposited by direct ion beam deposition method using mixture of C6H14 and H2 with and without silicon presence, have been investigated by Raman spectroscopy, X-ray photoelectron spectroscopy, ellipsometry, IR-visible-UV transmission, and electron paramagnetic resonance techniques. The D and G line widths and peak positions, integrated intensity ratio (ID/IG) in Raman spectra indicate these films being amorphous, mixture of sp2 and sp3 bonds. It has been found that a-C:H films formed while increasing substrate temperature and deposition ion energy tend to be graphite-like. Increasing of hydrogen content in gas mixture made these films more polymer-like with low content of dangling bonds. Traces of silicon increase sp3/sp2 ratio. The DLC films on silicon are able to greatly reduce IR reflection.

Paper Details

Date Published: 10 April 2001
PDF: 6 pages
Proc. SPIE 4415, Optical Organic and Inorganic Materials, (10 April 2001); doi: 10.1117/12.425504
Show Author Affiliations
M. Silinskas, Kaunas Univ. of Technology (Lithuania)
A. Grigonis, Kaunas Univ. of Technology (Lithuania)
G. Dikcius, Vilnius Univ. (Lithuania)
H. Manikowski, Institut Fizyki Politechnika Poznanska (Poland)


Published in SPIE Proceedings Vol. 4415:
Optical Organic and Inorganic Materials

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