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Proceedings Paper

Diagnostics of ultrathin dielectric layers by the method of differential reflection of light
Author(s): P. Adamson
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Paper Abstract

The effect of ultrathin dielectric layers on the reflection of linearly polarized light from transparent or strongly absorbing massive substrate or from an interference film from the viewpoint of optical diagnostics of such layers is investigated. Approximate formulas describing the contribution of ultrathin layers to conventional Fresnel reflectivity for s- and p-polarized light are obtained by the perturbation method. The dependence of the differential reflection on the angle of incidence and parameters of media is analyzed. It is shown that approximate expressions describing the differential reflection can be used to solve easily the inverse problem, in particular, for unambiguous determination of the thickness and refractive index of ultrathin surface layers.

Paper Details

Date Published: 10 April 2001
PDF: 6 pages
Proc. SPIE 4415, Optical Organic and Inorganic Materials, (10 April 2001); doi: 10.1117/12.425493
Show Author Affiliations
P. Adamson, Univ. of Tartu (Estonia)

Published in SPIE Proceedings Vol. 4415:
Optical Organic and Inorganic Materials
Steponas P. Asmontas; Jonas Gradauskas, Editor(s)

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