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Proceedings Paper

Light-induced parametric amplification in MEMS oscillators
Author(s): Maxim Zalalutdinov; Anatoli Olkhovets; Alan T. Zehnder; Bojan Ilic; D. Czaplewcki; Jeevak M. Parpia; Harold G. Craighead
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Paper Abstract

Micromechanical oscillators in the radio frequency (rf) range were fabricated in the form of silicon discs supported by a SiO2 pillar at the disc center. Effective spring constant of this oscillator can be controlled within the range (Delta) f/f approximately 10-4 by a low power laser beam, (Plaser approximately 100 (mu) W), focused at the periphery of the disc. Parametric amplification of the disc's vibrations was achieved through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by non-linear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Self- modulation of the CW laser beam (Plaser approximately 100 (mu) W) provided by placing the disc oscillator into an interference pattern setup can lead to parametric self- excitation.

Paper Details

Date Published: 5 April 2001
PDF: 9 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425400
Show Author Affiliations
Maxim Zalalutdinov, Cornell Univ. (United States)
Anatoli Olkhovets, Cornell Univ. (United States)
Alan T. Zehnder, Cornell Univ. (United States)
Bojan Ilic, Cornell Univ. (United States)
D. Czaplewcki, Cornell Univ. (United States)
Jeevak M. Parpia, Cornell Univ. (United States)
Harold G. Craighead, Cornell Univ. (United States)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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