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Proceedings Paper

Development of microelectromechanical varactors
Author(s): Chun-Hsien Lee; Shu-Hui Tsai; Chung-Hsien Lin; Ryutaro Maeda; Jiunn-Jye Tsaur; Kuan-Jen Fang; Ju-Mei Lu; Cheng-Kuo Lee; Weileun Fang
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Paper Abstract

A varactor with a wide tuning range is essential to adjust the desired frequency band among a wide Gigahertz range and compensate for process deviation as well as effects of temperature. Nowadays, conventional varactors with high quality cannot be available in standard silicon processes; furthermore, they cannot avoid high losses at high frequencies due to the nature of semiconductors. A novel micromachined varactor with a wide tuning range is presented. It can provide a digital selection of capacitance. The electroplating process was singled out to fabricate such as device, with its feature of high aspect ratio. The design has been verified through a finite-element analysis to show a tuning range of 350%.

Paper Details

Date Published: 5 April 2001
PDF: 8 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425389
Show Author Affiliations
Chun-Hsien Lee, Qic Engineering Corp. and National Tsing Hua Univ. (Taiwan)
Shu-Hui Tsai, Qic Engineering Corp. (Taiwan)
Chung-Hsien Lin, Qic Engineering Corp. and National Tsing Hua Univ. (Taiwan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)
Jiunn-Jye Tsaur, National Institute of Advanced Industrial Science and Technology (Japan)
Kuan-Jen Fang, Qic Engineering Corp. (Taiwan)
Ju-Mei Lu, Qic Engineering Corp. (Taiwan)
Cheng-Kuo Lee, Qic Engineering Corp. (Taiwan)
Weileun Fang, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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