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Proceedings Paper

Optical modeling of the analytical chamber of an IR gas sensor
Author(s): Ingo Sieber; Horst Eggert; Karl-Heinz Suphan; Oliver Nuessen
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Paper Abstract

Manufacturing test structures of microsensors and microactuators is very expensive in terms of time and materials. In a conventional design process, this limits the number of design variants to be considered. For this reason, computer-supported design techniques are becoming more and more important in microsystems technologies. In this paper, a system model of an IR gas sensor is presented. This model allows designs to be optimized, e.g. for use of the analysis chamber also to detect other gases with different absorption characteristics.

Paper Details

Date Published: 5 April 2001
PDF: 11 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425387
Show Author Affiliations
Ingo Sieber, Forschungszentrum Karlsruhe GmbH (Germany)
Horst Eggert, Forschungszentrum Karlsruhe GmbH (Germany)
Karl-Heinz Suphan, Micro-Hybrid Electronic GmbH (Germany)
Oliver Nuessen, Univ. of Bremen (Germany)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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