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Proceedings Paper

Numerical approach for the frequency-shifting analysis of electrostatic micromechanical actuator
Author(s): Kie-Chan Kwon; Wan-Sul Lee; Bong-Kyu Kim; Ji-Hyon Cho; Sung Kie Youn
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Paper Abstract

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic force and the displacement at the equilibrium. A staggered algorithm is employed to perform the coupled analysis of the electrostatic and elastic fields. The stiffness matrix of the actuator is modified at this equilibrium state. The displacement field is perturbed using an eigenmode profile of the actuator. The configuration change of the actuator due to perturbation modifies the electrostatic field and thus the electrostatic force. The equivalent stiffness matrix corresponding to the perturbation and the change in the electrostatic force is then added to stiffness matrix in order to explain natural frequency shifting. The numerical examples are presented and compared with the experiments in the literatures.

Paper Details

Date Published: 5 April 2001
PDF: 9 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425385
Show Author Affiliations
Kie-Chan Kwon, Korea Advanced Institute of Science and Technology (South Korea)
Wan-Sul Lee, Korea Advanced Institute of Science and Technology (South Korea)
Bong-Kyu Kim, Korea Advanced Institute of Science and Technology (South Korea)
Ji-Hyon Cho, Korea Advanced Institute of Science and Technology (South Korea)
Sung Kie Youn, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

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