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Proceedings Paper

Meshing approach in nonlinear FEM analysis of microstructures under electrostatic loads
Author(s): Aurelio Soma; Francesco De Bona; A. Gugliotta; E. Mola
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Paper Abstract

The aim of this work is that of analyzing how the discretization of a coupled electro-mechanical system has to be approached to have accurate results from a Finite Element Method (FEM) simulation. Main aspect concerns the definition of the finite element mesh at the interface between the two domains. From this point of view a hybrid approach is proposed, where a fixed mesh is used for the mechanical structure and for the electrostatic area, whereas a morphing approach is followed for the volume that surrounds the most deformable part of the structure. Other aspects related to the electrical domain discretization, as open boundary modelling, pole positioning of infinite mapped element dimension of the electrostatic area were also considered. Numerical tests were carried out in the simple case of a cantilever, following an explicit coupled solution based on an iterative scheme elaborated in ANSYSTM parametric design language (APDL).

Paper Details

Date Published: 5 April 2001
PDF: 10 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425377
Show Author Affiliations
Aurelio Soma, Politecnico di Torino (Italy)
Francesco De Bona, Univ. degli Studi di Udine and Sincrotrone Trieste (Italy)
A. Gugliotta, Politecnico di Torino (Italy)
E. Mola, Politecnico di Torino (Italy)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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