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Proceedings Paper

Micromechanical dc-dc converter
Author(s): Mikko Mottonen; Aarne S. Oja
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Paper Abstract

A micromechanical silicon device suitable for DC-DC voltage up-conversion is investigated theoretically. The behavior of the converter is simulated in the time domain using a circuit simulator. In simulations ignoring parasitic capacitances, DC voltage of level of 16 V is increased to 32 V using a micromechanical converter. The output power is 2 mW for a device with 1 mm2 surface area.

Paper Details

Date Published: 5 April 2001
PDF: 4 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425376
Show Author Affiliations
Mikko Mottonen, VTT Automation (Finland)
Aarne S. Oja, VTT Automation (Finland)


Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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