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Proceedings Paper

Design methods for microelectromechanical bandpass filters
Author(s): Dimitri Galayko; Andreas Kaiser
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Paper Abstract

A design method for high-order electro-mechanical filters that makes use of the equivalence between lumped-parameters electrical and mechanical systems is presented. Conditions for existence of the equivalent mechanical system are derived, and electro-statical coupling of micro-mechanical resonators is introduced. The application to the simulation and design of a bandpass filter with finite transmission zeros implemented in a thick-layer epi-poly silicon micro-machining technology is shown.

Paper Details

Date Published: 5 April 2001
PDF: 7 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425373
Show Author Affiliations
Dimitri Galayko, CNRS (France)
Andreas Kaiser, CNRS (France)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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