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Proceedings Paper

Thermal and mechanical evaluation of micromachined planar spiral inductors
Author(s): Renato P. Ribas; Jerome Lescot; Jean Louis Leclercq; Bernard Courtois
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Paper Abstract

Micromachined planar spiral inductors and transformers have been largely proposed for RF applications, using MEMS processes. Q-factors and self-resonant frequencies have been significantly increased by suspending such structures. However, thermal and mechanical properties are somewhat compromised. In this paper, a complete analysis of such parameters is presented through extensive finite element method (FEM) simulations. Partially released structure is proposed to avoid these troubles.

Paper Details

Date Published: 5 April 2001
PDF: 7 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425369
Show Author Affiliations
Renato P. Ribas, Univ. Federal do Rio Grande do Sul (France)
Jerome Lescot, LEMO/CNRS (France)
Jean Louis Leclercq, LEOM/CNRS (France)
Bernard Courtois, TIMA Lab. (France)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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